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Category:2004 video games
Category:Windows games
Category:Windows-only games
Category:Call of Duty
Category:First-person shooters
Category:Video games developed in the United States
Category:Video games set in the 2030s1. Field of the Invention
The present invention relates to a method for manufacturing a resist mask used for fabricating, e.g., a semiconductor device or a liquid crystal display device. Particularly, the present invention relates to a method for forming a pattern on a substrate by using a predetermined resist mask. The predetermined resist mask is used for forming, e.g., a gate pattern of a metal-oxide semiconductor field-effect transistor (MOSFET).
2. Description of the Related Art
In the conventional method, a resist mask used for fabricating a gate electrode of a MOSFET is formed in the following process.
First, a buffer layer is formed on a silicon substrate.
Then, photoresist is applied to the buffer layer to form a photoresist layer.
Then, the photoresist layer is exposed to light so as to form a predetermined pattern on the photoresist layer.
Then, the photoresist layer is subjected to pattern development so as to form a gate pattern with the predetermined pattern formed thereon.
Then, the buffer layer under the gate pattern is dry-etched by using the gate pattern as an etching mask.
By etching a part of the silicon substrate by using the gate pattern as an etching mask, the gate electrode is formed.
In the above-described conventional method, the structure of the photoresist layer is one with the photoresist layer formed so as to have a predetermined pattern.
FIGS. 2A-2E are cross-sectional views of the steps in a conventional method for forming a photoresist pattern on a photoresist layer.
In FIG. 2A, a buffer layer 12 is formed on a silicon substrate 11.
Then, a photoresist layer 13 is formed on the buffer layer 12.
As shown in FIG. 2B, the photoresist layer 13 is subjected to exposure to light so as to form a predetermined pattern (not shown) on the photoresist layer 13.
Then, the photoresist layer 13 is subjected to pattern development so as to form a gate pattern 13a.
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Call of Duty Advanced Warfare full game for PC, ?rating: 7.8, released date: 2014, developer: Sledgehammer Games, Download Here Free Size: 43.5 GB, .
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The Call of Duty® 4: Modern Warfare® and Call of Duty® 5: World at War™ maps are now playable in the Call of Duty® Advanced Warfare Exo-Zombies scenario.
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Download Call of Duty Advanced Warfare full game for PC, ?rating: 7.8, released date: 2014, developer: Sledgehammer Games, Download Here Free Size: 43.5 GB, .
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Zombie Exo and Tank Mode Added to Exo Survival Mode in Call Of Duty: Advanced Warfare The World Premier Of Call Of Duty: Advanced Warfare Exo Zombies Trailer Arrives During
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